Project information
Process control form plasma coating and nitriding by spectroscopic ellipsometry
(PC_PCN_SE)
- Project Identification
- G5ST-CT-2002-50362
- Project Period
- 8/2003 - 7/2005
- Investor / Pogramme / Project type
-
European Union
- 5th Specific RTD Programme
- MU Faculty or unit
- Faculty of Science