OPTICAL-SPECTRA OF SIXGE1-X ALLOYS
| Authors | |
|---|---|
| Year of publication | 1989 |
| Type | Article in Periodical |
| Magazine / Source | J. Appl. Phys. |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Description | We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures. |