Project information
Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
- Project Identification
- GA202/07/1669
- Project Period
- 1/2007 - 12/2011
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
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Faculty of Science
- doc. RNDr. Vilma Buršíková, Ph.D.
- Mgr. Oto Brzobohatý, Ph.D.
- doc. Mgr. Pavel Dvořák, Ph.D.
- Mgr. Daniel Franta, Ph.D.
- prof. RNDr. Josef Havel, DrSc.
- prof. RNDr. Jan Janča, DrSc.
- prof. RNDr. Vladislav Navrátil, CSc.
- doc. Mgr. Zdeněk Navrátil, Ph.D.
- prof. RNDr. Ivan Ohlídal, DrSc.
- doc. Mgr. Pavel Sťahel, Ph.D.
- prof. RNDr. David Trunec, CSc.
- doc. Mgr. Lenka Zajíčková, Ph.D.
- Keywords
- PECVD, dual frequency capacitive discharges DF CCP, nanostrukturovaný DLC, termomechanická kapacita
- Cooperating Organization
-
Institute of Nuclear Physics
- Responsible person RNDr. Vratislav Peřina, CSc.
- Responsible person Ing. Jaroslav Sobota, CSc.
- Responsible person Mgr. Petr Klapetek, Ph.D.
The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation (controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy.
Publications
Total number of publications: 70
2010
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Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage
Plasma Physics and Controlled Fusion, year: 2010, volume: 52, edition: 12, DOI
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Multilayered transparent polymer protective coatings using PECVD
Year: 2010, type: Conference abstract
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Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
Surface & coatings technology, year: 2010, volume: 204, edition: 12-13
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PREPARATION AND CHARACTERIZATION OF DLC:N FILMS
2nd International Conference Nanocon 2010, year: 2010
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Preparation of multifunctional layered materials
Year: 2010, type: Conference abstract
2009
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Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films
Diamond and Related Materials, year: 2009, volume: 18, edition: 2-3
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Gold carbides laser ablation synthesis and mass spectrometry
Frontiers in Low Temperature Plasma Diagnostic 8, year: 2009
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Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry
Diamond and Related Materials, year: 2009, volume: 18, edition: 2-3, DOI
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Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)
Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009
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Limitations and possible improuvements of DLC dielectric response model based on parameterization of density of states
Diamond and Related Materials, year: 2009, volume: 18, edition: 2-3